MEMS의 기초 (Foundations of MEMS , Chang Liu) 연습문제 解法(솔루션)
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작성일 19-11-10 05:45본문
Download : [솔루션] MEMS의 기초(Foundations of MEMS, Chang Liu) 연습문제 솔루션.zip
설명
MEMS의 기초 (Foundations of MEMS , Chang Liu) 연습문제 解法(솔루션)
Download : [솔루션] MEMS의 기초(Foundations of MEMS, Chang Liu) 연습문제 솔루션.zip( 46 )
MEMS의,기초,(Foundations,of,MEMS,,Chang,Liu),연습문제,솔루션,기계설계,솔루션
순서
SOLCpt01 Introduction
SOLCpt02 IntroFab
SOLCpt03E lecMechConcepts
SOLCpt04E lectrostatic
SOLCpt05 Thermal
SOLCpt06 Piezoresistive
SOLCpt07 Piezoelectric
SOLCpt08 Magnetic
SOLCpt09- Summary
SOLCpt10 FabBulk
SOLCpt11- 5FabSurface
SOLCpt12- 5PolymerMEMS
SOLCpt13- 2Fluidic
SOLCpt14-5 SPM
SOLCpt15-4O pticalMirror
SOLCpt16 ProcessIntegration
으로 구성 되어있습니다..^^)
Problems
Problem 1: Review
Read the following sections in the paper titled silicon as a mechanical material by Kurt
Petersen: Sections I, II, IV, VI, VIII [10]. The paper can be found in the library or on-line.
Problem 2: Review
Locate the following MEMS-specific journals and conference proceedings in your library or online:
(1) Sensors and Actuators (S&A); (2) Proceedings of IEEE Annual International Workshop
on Micro Electro Mechanical Systems (the name was changed to IEEE International Conference
on Micro Electro Mechanica
솔루션/기계설계
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다.
그리고 1장의 한 부분을 발췌하면!(설계 부분에서는 수식이 나오나 여기서 나타내기에는 제한이 있으므로 책과 맞는지 확인하고 받으시길 바랍니다.